TRUMPF Hüttinger TruPlasma RF 1000-1/13 Air, a 1 kW, 13.56 MHz air-cooled RF plasma generator made July 2020. It's built for semiconductor, solar, display and R&D plasma processes, including RIE etching, PECVD, ALD and RF sputtering. It delivers precise, repeatable RF power with fast arc management, pulsing and auto frequency tuning, in a compact ½-19" plug-in format.
Model / part number: TruPlasma RF 1000-1/13 Air, P/N 3000406
Serial: 205139862
Output: 1 kW at 13.56 MHz, 50 Ω
Cooling: Air-cooled (no water lines needed)
Power input: Single-phase 190–240 VAC ±10%, 10 A, 50/60 Hz
Interfaces:
EtherCAT in/out
Ethernet
USB service port
AD user interface (D-sub)
Matchbox control port
Sync / pulse I/O:
Arc in/out
Key-in
Pulse in/out
Clock in/out (SMA)
Arc-Sync-DC
Features:
Arc management
Multi-level pulsing
Auto frequency tuning
Rotary ID address switches
Status LEDs
Origin: Made in Germany. CE, NRTL (61010-1).
Buy with confidence, this item is backed by our 30-Day Guarantee and handled with care from order to delivery.
Terms & Conditions
Contact us via our website before checkout.
Returns
30-Days, Must remain in its original condition
Shipping and Handling
Most orders ship within 1 business day
Contact Us
Have a question? Reach out anytime.
We strive for 5-Star service on every transaction.
If there's any issue with your order, please contact us before leaving feedback.
TRUMPF Hüttinger TruPlasma RF 1000-1/13 Air, a 1 kW, 13.56 MHz air-cooled RF plasma generator made July 2020. It's built for semiconductor, solar, display and R&D plasma processes, including RIE etching, PECVD, ALD and RF sputtering. It delivers precise, repeatable RF power with fast arc management, pulsing and auto frequency tuning, in a compact ½-19" plug-in format.
Model / part number: TruPlasma RF 1000-1/13 Air, P/N 3000406
Serial: 205139862
Output: 1 kW at 13.56 MHz, 50 Ω
Cooling: Air-cooled (no water lines needed)
Power input: Single-phase 190–240 VAC ±10%, 10 A, 50/60 Hz
Interfaces:
EtherCAT in/out
Ethernet
USB service port
AD user interface (D-sub)
Matchbox control port
Sync / pulse I/O:
Arc in/out
Key-in
Pulse in/out
Clock in/out (SMA)
Arc-Sync-DC
Features:
Arc management
Multi-level pulsing
Auto frequency tuning
Rotary ID address switches
Status LEDs
Origin: Made in Germany. CE, NRTL (61010-1).
Buy with confidence, this item is backed by our 30-Day Guarantee and handled with care from order to delivery.
Terms & Conditions
Contact us via our website before checkout.
Returns
30-Days, Must remain in its original condition
Shipping and Handling
Most orders ship within 1 business day
Contact Us
Have a question? Reach out anytime.
We strive for 5-Star service on every transaction.
If there's any issue with your order, please contact us before leaving feedback.
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