TRUMPF Hüttinger TruPlasma Match 1001/13 G2, a 1 kW, 13.56 MHz automatic RF impedance matching network (matchbox). It provides fast, stable, reproducible matching to 50 Ω for semiconductor, solar, display and R&D plasma processes, including RIE and plasma etching, PECVD, ALD, RF sputtering and photoresist ashing. Pairs with TruPlasma RF 1000-series generators.
- Model: TruPlasma Match 1001/13 G2
- Material No.: 2429981
- Serial No.: 205600224
- Power / frequency: 1 kW class, 13.56 MHz, 50 Ω input
- RF input: Coaxial connector with protective cover
- RF output: Threaded brass output stud with PTFE insulator
- Interfaces: EtherCAT in/out (with rotary address switches), RS232, RS485, USB, SystemPORT, Analog (D-sub)
- Power: 24 VDC input, 6.3 A fuse
- Cooling: Fan-cooled
- Features: Real-time RF power measurement at input and output, automatic tuning, status LEDs
- Origin: TRUMPF Huettinger, Poland
Condition: Used. Cosmetic handling marks on the enclosure (see photos). Sold as shown; no cables included unless pictured.
Note: As stated on the unit's label, TruPlasma Match products may require customer process adaptation (tuning for your chamber and process).
TRUMPF Hüttinger TruPlasma Match 1001/13 G2, a 1 kW, 13.56 MHz automatic RF impedance matching network (matchbox). It provides fast, stable, reproducible matching to 50 Ω for semiconductor, solar, display and R&D plasma processes, including RIE and plasma etching, PECVD, ALD, RF sputtering and photoresist ashing. Pairs with TruPlasma RF 1000-series generators.
- Model: TruPlasma Match 1001/13 G2
- Material No.: 2429981
- Serial No.: 205600224
- Power / frequency: 1 kW class, 13.56 MHz, 50 Ω input
- RF input: Coaxial connector with protective cover
- RF output: Threaded brass output stud with PTFE insulator
- Interfaces: EtherCAT in/out (with rotary address switches), RS232, RS485, USB, SystemPORT, Analog (D-sub)
- Power: 24 VDC input, 6.3 A fuse
- Cooling: Fan-cooled
- Features: Real-time RF power measurement at input and output, automatic tuning, status LEDs
- Origin: TRUMPF Huettinger, Poland
Condition: Used. Cosmetic handling marks on the enclosure (see photos). Sold as shown; no cables included unless pictured.
Note: As stated on the unit's label, TruPlasma Match products may require customer process adaptation (tuning for your chamber and process).
Your Trusted Supply Partner
We are committed to providing products that meet the highest standards of quality and reliability.
Our knowledgeable team is here to assist you with expert advice and support tailored to your specific needs.
We continuously update our product offerings to include the latest advancements and technologies.
Your satisfaction is our priority, and we strive to deliver exceptional service and support.
