Ebara EV-S20P multi-stage Roots dry vacuum pump, built for semiconductor, thin-film, R&D and lab vacuum work. The oil-free, non-contact design gives clean, stable vacuum with low noise and vibration, and it produces no tip-seal dust.
Model: EV-S20P
Unit number: DKA01468
Pumping speed: 1,670 L/min (about 60 CFM)
Ultimate pressure: 5.0 Pa (about 37 mTorr)
Power: 200–220 VAC, 3-phase, 50/60 Hz, 9.1 A full load
Cooling: Water-cooled
Inlet: NW50 with clamp
Outlet: KF gas outlet
Features:
N2 purge regulator and gauge
Ventilating duct port
Built-in breaker
External interlock
Control connectors
COM1/COM2 and LCD1/LCD2 ports
Included: Power cable with a 20 A 250 V twist-lock plug
Weight: 60 kg (132 lb)
Buy with confidence, this item is backed by our 30-Day Guarantee and handled with care from order to delivery.
Terms & Conditions
Contact us via our website before checkout.
Returns
30-Days, Must remain in its original condition
Shipping and Handling
Most orders ship within 1 business day
Contact Us
Have a question? Reach out anytime.
We strive for 5-Star service on every transaction.
If there's any issue with your order, please contact us before leaving feedback.
Ebara EV-S20P multi-stage Roots dry vacuum pump, built for semiconductor, thin-film, R&D and lab vacuum work. The oil-free, non-contact design gives clean, stable vacuum with low noise and vibration, and it produces no tip-seal dust.
Model: EV-S20P
Unit number: DKA01468
Pumping speed: 1,670 L/min (about 60 CFM)
Ultimate pressure: 5.0 Pa (about 37 mTorr)
Power: 200–220 VAC, 3-phase, 50/60 Hz, 9.1 A full load
Cooling: Water-cooled
Inlet: NW50 with clamp
Outlet: KF gas outlet
Features:
N2 purge regulator and gauge
Ventilating duct port
Built-in breaker
External interlock
Control connectors
COM1/COM2 and LCD1/LCD2 ports
Included: Power cable with a 20 A 250 V twist-lock plug
Weight: 60 kg (132 lb)
Buy with confidence, this item is backed by our 30-Day Guarantee and handled with care from order to delivery.
Terms & Conditions
Contact us via our website before checkout.
Returns
30-Days, Must remain in its original condition
Shipping and Handling
Most orders ship within 1 business day
Contact Us
Have a question? Reach out anytime.
We strive for 5-Star service on every transaction.
If there's any issue with your order, please contact us before leaving feedback.
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